Benlatreche, Mohamed- el -Salah; Benouakta,Meriem
(Université Frères Mentouri - Constantine 1, 2001-11-14)
the silicides have a great importance in micro-electronics, such as for the manufacture
of the VLSI, HLSI, on the level of the contacts with metal. Among these silicides
there is titanium silicide, which has a very low ...