Effect of the heat treatment on the properties of Al doped ZnO thin films prepared by sol–gel technique

Abstract

In this work Al doped ZnO thin films were deposited on the silicium substrates by a dip coating sol–gel technique. The influences of annealing temperature on the structural and optical properties of aluminum doped ZnO (AZO) films were investigated. The structural properties of the ZnO films such as surface morphology and crystallinity were determined scanning electron microscopy (SEM) and X-ray diffractometry (XRD), respectively. The optical properties of the ZnO films were characterized by the photoluminescence spectroscopy. The experimental results reveal that the thermal annealing treatment affects the properties of the ZnO films