MEZIANI, S; MOUSSI, A; EL AMRANI, A; OUTEMZABET, R; MAHIOU, M
(Université Frères Mentouri - Constantine 1, 2013-12-16)
Plasma Enhanced Chemical Vapor Deposition (PECVD) silicon nitride (SiNx:H,
simply called SiNx) has been widely used in photovoltaic silicon solar cells as dielectric,
because of low deposited temperature and compatibility ...