Dépôt et Caractérisation des Electrodes en Couches Minces Transparentes et Conductric

Abstract

Our work concerns the development and the characterization of the electrodes in conducting transparent thin films: ZnO, SnO , In O , binary mixtures and ternary mixtures by ultrasonic spray technique at °C. In the first part of this thesis, we conducted three series of binary oxides (ZnO: SnO2) (ZnO:In O ) and (SnO :In O ) and in the second part, we conducted three series of ternary oxide (ZnO:SnO :In O ). We studied the influence of the mixing ratio of the components on the characteristics of films. These films are analyzed by various techniques of characterization of materials. The structural characterization of films by analysis of the spectra of diffraction of the X-ray showed that the films of the binary and ternary mixtures containing ZnO present a preferential direction according to the plan (002) and (100) for the series (ZnO:In O ). In films of the series (SnO :In O ) and In O3 (1 -X) SnO2 (0.5X) ZnO (0.5X) the preferential orientation is along the axis (222) of In O . The UV-Visible spectrophotometer of these films confirms that it is possible to obtain good transparent films of operating TCO with a transmittance of about 75 to 85% in the visible one. The measurement of electric conductivity also confirmed that the combination of transparent oxides can improve their conductivity up to (Ω cm) -