Riah, Badis; Rouag, Nadjet
(Université Frères Mentouri - Constantine 1, 2019-06-10)
The objective of this thesis is to study the influence of anisotropy on the quality of AlN thin films, developed by two physical vapor deposition (PVD) techniques, DCMS and HiPIMS. AlN exists in two phases: a stable hexagonal ...