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GROWTH SCENARIO OF ALN THIN FILM ON Si (100) 

ZADAM, M; JOUAN, P-Y; DJOUADI, M.A; DEBILI, M.Y (Université des Frères Mentouri Constantine, 2013-12-16)
Analysis of AlN thin films grown on Si (100) substrates, by DC magnetron sputtering, were made with XRD, SEM for structural and morphology properties. An examination of the evolution of c-axis preferential orientation ...

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Author
DEBILI, M.Y (1)
DJOUADI, M.A (1)
JOUAN, P-Y (1)
ZADAM, M (1)SubjectAlN (1)DC Reactive Sputtering (1)High Resolution Transmission Electron Microscopy (1)
Stress Profile (1)
X-ray Diffraction (1)
... View MoreDate Issued2013 (1)

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