Abstract:
CrN is an excellent wear and corrosion resistant material. There is much interest
in the research community to develop CrN thin films for coating tools for metal and wood
machining operations [1,2]. Chromium nitride was widely studied and developed by classical
magnetron sputtering [3] and more recently for further improvements by HiPIMS [4, 5].
In this work, we varied different process parameters but we choose to focus on the short
durations, typically between 10 and 50μs and also the peak current. Annealing tests were
carried out up to 1200K in order to study the thermal stability of Cr and CrN films under
different atmospheres. Finally, another material Aluminum nitride had been deposited by DC
and HiPIMS magnetron sputtering.
According to the results obtained for these materials, a comparison between DC and HiPIMS
will be made and the advantages and drawbacks of both techniques will be discussed
