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    • PHOSPHORUS DEACTIVATION PROCESS IN SILICON SUBMITTED TO HYDROGEN PLASMA 

      BELFENNACHE, D; MADI, D; BRIHI, N (Université des Frères Mentouri Constantine, 2016-10-31)
      C-V measurement is an efficient method to determine the active doping concentration in silicon. In this study, we use it in the aim to understand the process which govern the phosphorus deactivation by hydrogen. To do ...